ECTI Lab Tour

(Information provided by ECTI)

The Emerging Communications Technology Institute (ECTI) is an interdisciplinary research institute based at the University of Toronto. ECTI provides global university-based leadership through access to state-of-the-art research facilities, promotion of collaborative research with strategic partners, and by facilitating advanced educational opportunities and information exchange events. Key research areas include nanotechnology and nanofabrication, photonic materials and devices, micro- and nano-electromechanical systems (M/NEMS), biotechnology, microwave devices, micro- and nano-electronic devices, integrated optics, and photovoltaic devices.

ECTI Electron Beam Nanolithography Facility

Location: Wallberg Room 38 (basement)
Time: 10:00 AM

Lab description: Opened in 2009, the Class 100 cleanroom space houses an Electron Beam Lithography tool, which is one of only two such tools in Canada. With the capability to define features as small as 10 nanometres, this technology offers a broad-based fabrication platform for research in areas ranging from electronic devices and integrated optics to the emerging fields of nanobiotechnology, nanoelectromechanical systems (NEMS), nanophotonics and nanomagnetics.

ECTI Bahen Prototyping Cleanroom

Location: BA 7180
Time: 1:30 PM

Lab description: The Bahen Cleanroom provides two large areas in which to fabricate devices in silicon, compound semiconductors, ceramic, glass, and polymer. Resources include a Class 1000 photolithography/wet chemistry space, including three fully exhausted acid wet benches and a Class 10,000 space housing deposition and etching machines. Key research areas in this cleanroom include photonics, biomedical engineering, lab-on-a-chip, MEMS, and microfluidics.

ECTI Pratt Microfabrication Cleanroom

Location: Pratt 464
Time: 4:00 PM

Lab description: The Pratt Cleanroom consists of four modules which are configured as a) a dark room, b) a yellow room for lithography, c) an etching room and d) a furnace room. Other facilities within the cleanroom include oxidation furnaces, sputter deposition, PECVD and LPCVD facilities and wet etching. Significant upgrades, including the installation of a deep reactive ion etcher (DRIE), are expected in the next year. The research capacity supports developments in such areas as photovoltaic solar cells, microfluidics, MEMS, and microsensors.